Load lock type FCVA device
A good film thickness distribution can be obtained! Customizable load-lock coating equipment.
We would like to introduce our "Load Lock Type FCVA Device." The load lock method improves membrane stability and suppresses particle adhesion. It is used by major lens manufacturers as a device for forming release films for glass lens molds. The substrate rotation mechanism allows for a good film thickness distribution. It is possible to combine elemental technologies such as "FCVA Carbon Source," "FCVA Metal Source," "Ion Beam," and "Sputtering" into a single device. 【Features】 ■ Load lock method ■ Improves membrane stability and suppresses particle adhesion ■ Good film thickness distribution achieved through substrate rotation mechanism ■ Customizable *For more details, please feel free to contact us.
- 企業：株式会社ナノフィルムテクノロジーズ ジャパン
- 価格：Other
